From eenriquez at snf.stanford.edu Fri Apr 2 14:30:43 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Apr 2010 14:30:43 -0700 Subject: Shutdown pquest SNF 2010-03-31 21:53:07: pump failure Message-ID: Replaced the foreline pump. Vented chamber and replaced clamp springs. Ran O2 plasma. From eenriquez at snf.stanford.edu Fri Apr 2 14:31:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Apr 2010 14:31:00 -0700 Subject: Comment pquest SNF 2010-03-31 22:07:56: pump Message-ID: Archived From rissman at snf.stanford.edu Fri Apr 2 17:53:14 2010 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Fri, 2 Apr 2010 17:53:14 -0700 Subject: Comment pquest SNF 2010-04-02 17:53:14: system after service Message-ID: The chrome etch we ran seemed normal. Helium leak was ~6,5. From cbaxter at snf.stanford.edu Sat Apr 3 09:43:55 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 3 Apr 2010 09:43:55 -0700 Subject: Problem pquest SNF 2010-03-30 23:01:12: Wafer popping on unload Message-ID: Cleaned clamp and changed chuck o-ring. the best backside he i get is 5sccm. From cbaxter at snf.stanford.edu Sat Apr 3 09:44:19 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 3 Apr 2010 09:44:19 -0700 Subject: Problem pquest SNF 2010-03-30 19:49:11: High He blow-by Message-ID: From tdo at snf.stanford.edu Sat Apr 3 14:40:54 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sat, 3 Apr 2010 14:40:54 -0700 Subject: Shutdown pquest SNF 2010-04-03 14:40:53: Wafer broke during clamp down Message-ID: 1) Still see wafer popping on unload 2) During second run, suspect wafer broke during clamp down -- there was high He during run, and likely burnt resist (based on in situ laser reflectance monitor). when tried to unload, saw the wafer in two pieces. Stopped the arm, wafer is stuck in chamber. Please retrieve since i have a very important sample mounted on there (that i hope isn't ruined) Please email me with location -- i'll leave a wafer box out. Thanks From shott at snf.stanford.edu Mon Apr 5 15:17:31 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Apr 2010 15:17:31 -0700 Subject: Shutdown pquest SNF 2010-04-03 14:40:53: Wafer broke during clamp down Message-ID: Tom and I cleared the wafer, did a light wet wipedown of the system, and put the O-ring back. Tom is doing a waferless oxygen3 run for a whiloe to try to remove stickiness from the O-ring. It should be ready to go when he finishes. John From cbaxter at snf.stanford.edu Sat Apr 10 09:41:19 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 10 Apr 2010 09:41:19 -0700 Subject: Problem pquest SNF 2010-03-30 23:00:18: Observed unstable ECR Power Message-ID: From tzhu at snf.stanford.edu Mon Apr 12 15:01:00 2010 From: tzhu at snf.stanford.edu (tzhu at snf.stanford.edu) Date: Mon, 12 Apr 2010 15:01:00 -0700 Subject: Shutdown pquest SNF 2010-04-12 15:01:00: Wafer break Message-ID: substrate is stick to the o-ring, it breaks the wafers. From eenriquez at snf.stanford.edu Tue Apr 13 15:14:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Apr 2010 15:14:33 -0700 Subject: Shutdown pquest SNF 2010-04-12 15:01:00: Wafer break Message-ID: User's quartz wafer stuck to the o-ring. The o-ring was pulled out of its groove when the system tried to unload the wafer. Replaced the o-ring (2-149, durometer 50) and replaced the springs. Helium flow @10 Torr < 0.5 sccm. From bryane at snf.stanford.edu Wed Apr 14 17:38:10 2010 From: bryane at snf.stanford.edu (bryane at snf.stanford.edu) Date: Wed, 14 Apr 2010 17:38:10 -0700 Subject: Shutdown pquest SNF 2010-04-14 17:38:09: wafer fell off the pins Message-ID: My wafer fell off one of the pins. The wafer is not broken, but is sitting at an angle in the chamber. From rissman at snf.stanford.edu Thu Apr 15 13:23:14 2010 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Thu, 15 Apr 2010 13:23:14 -0700 Subject: Shutdown pquest SNF 2010-04-14 17:38:09: wafer fell off the pins Message-ID: Released by Jim Kruger From rissman at snf.stanford.edu Thu Apr 15 13:24:28 2010 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Thu, 15 Apr 2010 13:24:28 -0700 Subject: Problem pquest SNF 2010-04-15 13:24:27: still in test mode Message-ID: New skinny o-ring. Helium is 4.5-5. Per Jim Kruger. From ntayebi at snf.stanford.edu Thu Apr 15 14:25:46 2010 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Thu, 15 Apr 2010 14:25:46 -0700 Subject: Shutdown pquest SNF 2010-04-15 14:25:46: shutdown-wafer broke during unloading Message-ID: The wafer broke again during unloading. I'm not sure if my sample ( a quarter of a wafer) has survived. In case it did, I left a container if you could put it back in there. Thanks Noureddine From eenriquez at snf.stanford.edu Fri Apr 16 14:21:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Apr 2010 14:21:07 -0700 Subject: Shutdown pquest SNF 2010-04-15 14:25:46: shutdown-wafer broke during unloading Message-ID: Cleaned chamber. Replaced the silicone o-ring with a viton o-ring to prevent the wafer from sticking to the o-ring. Please do not run the electrode temp > 160. Also, do not run a process without a wafer. From eenriquez at snf.stanford.edu Mon Apr 19 14:40:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Apr 2010 14:40:21 -0700 Subject: Comment pquest SNF 2010-04-19 14:40:21: Completed wetclean Message-ID: From arkam at snf.stanford.edu Wed Apr 21 14:51:20 2010 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Wed, 21 Apr 2010 14:51:20 -0700 Subject: Shutdown pquest SNF 2010-04-21 14:51:20: the wafer fell of f the pin---the wafre is not broken--but is inside the chamber Message-ID: From eenriquez at snf.stanford.edu Wed Apr 21 16:29:18 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Apr 2010 16:29:18 -0700 Subject: Shutdown pquest SNF 2010-04-21 14:51:20: the wafer fell of f the pin---the wafre is not broken--but is inside the chamber Message-ID: Recovered the wafer. Conditioned the o-ring and cycled a wafer. From sdogbe at snf.stanford.edu Thu Apr 22 18:09:04 2010 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Thu, 22 Apr 2010 18:09:04 -0700 Subject: Shutdown pquest SNF 2010-04-22 18:09:03: Robot arm unable to retrieve wafer Message-ID: Very important Wafer is resting on the chuck. Cannot be retrieved by the robot arm. Need the wafer back. From eenriquez at snf.stanford.edu Fri Apr 23 10:54:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Apr 2010 10:54:42 -0700 Subject: Shutdown pquest SNF 2010-04-22 18:09:03: Robot arm unable to retrieve wafer Message-ID: Recovered the user's wafer. Conditioned the o-ring with an O2 plasma for 30 min. Previous conditioning was ran for 3 min. Cycled wafer with no sign of wafer sticking to the o-ring. From ericp at snf.stanford.edu Fri Apr 30 00:46:28 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 30 Apr 2010 00:46:28 -0700 Subject: Problem pquest SNF 2010-04-30 00:46:27: EP laser loose Message-ID: The EP laser is loose from the mount, just kind of hanging. From tdo at snf.stanford.edu Fri Apr 30 15:40:07 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Fri, 30 Apr 2010 15:40:07 -0700 Subject: Problem pquest SNF 2010-04-30 00:46:27: EP laser loose Message-ID: this is the long wavelength laser that few (any?) members use right now. secured back into the optical mount.