Shutdown pquest SNF 2010-04-03 14:40:53: Wafer broke during clamp down

tdo at snf.stanford.edu tdo at snf.stanford.edu
Sat Apr 3 14:40:54 PDT 2010


1)  Still see wafer popping on unload
2)  During second run, suspect wafer broke during clamp down -- there was high He during run, and likely burnt resist (based on in situ laser reflectance monitor).  when tried to unload, saw the wafer in two pieces.
Stopped the arm, wafer is stuck in chamber.  Please retrieve since i have a very important sample mounted on there (that i hope isn't ruined)
Please email me with location -- i'll leave a wafer box out.    Thanks




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