Shutdown pquest SNF 2010-04-12 15:01:00: Wafer break
tzhu at snf.stanford.edu
tzhu at snf.stanford.edu
Mon Apr 12 15:01:00 PDT 2010
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Problem pquest SNF 2010-03-30 23:00:18: Observed unstable ECR Power
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Shutdown pquest SNF 2010-04-12 15:01:00: Wafer break
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substrate is stick to the o-ring, it breaks the wafers.
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Problem pquest SNF 2010-03-30 23:00:18: Observed unstable ECR Power
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Shutdown pquest SNF 2010-04-12 15:01:00: Wafer break
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