Shutdown pquest SNF 2010-04-15 14:25:46: shutdown-wafer broke during unloading

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 16 14:21:07 PDT 2010


Cleaned chamber.  Replaced the silicone o-ring with a viton o-ring to prevent the wafer from sticking to the o-ring. Please do not run the electrode temp > 160.  Also, do not run a process without a wafer.




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