Shutdown pquest SNF 2010-04-22 18:09:03: Robot arm unable to retrieve wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 23 10:54:42 PDT 2010


Recovered the user's wafer.  Conditioned the o-ring with an O2 plasma for 30 min.  Previous conditioning was ran for 3 min.  Cycled wafer with no sign of wafer sticking to the o-ring.




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