Shutdown pquest SNF 2010-08-21 11:42:43: wafer stuck inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 23 08:57:27 PDT 2010


Wafer recoverd and placed in the user's wafer container.  Optical sensors (clamp up/down, load arm) are having an intermittent connection problem. Will continue to troubleshoot.  Now performing a scheduled wet clean.




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