From tzhu at snf.stanford.edu  Tue Dec  7 18:46:33 2010
From: tzhu at snf.stanford.edu (tzhu at snf.stanford.edu)
Date: Tue, 7 Dec 2010 18:46:33 -0800
Subject: Shutdown pquest SNF 2010-12-07 18:46:33: power generator
Message-ID: <mailman.1661.1357938573.25846.pquest-pcs@snf.stanford.edu>

700W rf power generator can not work properly, it shows ovld, reset & rerun maybe ok, but can not sustain for long time. 



From eenriquez at snf.stanford.edu  Wed Dec  8 19:00:19 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Dec 2010 19:00:19 -0800
Subject: Comment pquest SNF 2010-12-08 19:00:19: Update
Message-ID: <mailman.1662.1357938573.25846.pquest-pcs@snf.stanford.edu>

The microwave generator overload light turned on when we ran it for ~ 45 min at 700W.  Jim K was not able to make it fail when ran at 300 W and 500 W for more than 1 hour.  Still troubleshooting.



From eenriquez at snf.stanford.edu  Thu Dec  9 12:08:50 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 9 Dec 2010 12:08:50 -0800
Subject: Shutdown pquest SNF 2010-12-07 18:46:33: power generator
Message-ID: <mailman.1663.1357938573.25846.pquest-pcs@snf.stanford.edu>

Replaced a power supply cooling fan.  Ran Oxygen3 (700W) for > 1 hour with no problems.  However, when I tried to rerun the process immediately, the generator overload indicatior lit up.  When I modified the recipe and placed a "soft start" step of 1 watt ECR for 5 sec right before the main etch, the system ran OK.  Still trying to troubleshoot the problem, but this may be a temporary work around for the etch recipes that require high power.



From eenriquez at snf.stanford.edu  Thu Dec  9 12:09:08 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 9 Dec 2010 12:09:08 -0800
Subject: Comment pquest SNF 2010-12-08 19:00:19: Update
Message-ID: <mailman.1664.1357938573.25846.pquest-pcs@snf.stanford.edu>

Archived



From krivoire at snf.stanford.edu  Fri Dec 10 18:34:42 2010
From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu)
Date: Fri, 10 Dec 2010 18:34:42 -0800
Subject: Comment pquest SNF 2010-12-10 18:34:41: out of logbook sheets
Message-ID: <mailman.1665.1357938573.25846.pquest-pcs@snf.stanford.edu>

also none in the folder in the gowning room



From altamash at snf.stanford.edu  Sat Dec 11 11:39:39 2010
From: altamash at snf.stanford.edu (altamash at snf.stanford.edu)
Date: Sat, 11 Dec 2010 11:39:39 -0800
Subject: Comment pquest SNF 2010-12-11 11:39:39: No torch/light
Message-ID: <mailman.1666.1357938573.25846.pquest-pcs@snf.stanford.edu>




From jimkruger at snf.stanford.edu  Wed Dec 15 16:05:26 2010
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Wed, 15 Dec 2010 16:05:26 -0800
Subject: Comment pquest SNF 2010-12-15 16:05:25: Pressuer zero drift?
Message-ID: <mailman.1667.1357938573.25846.pquest-pcs@snf.stanford.edu>

Over thc course of ~ 2 hrs, I noticed an apparent Zero drift of +0.7 mTorr (I had zeroed at start , found 0.7 mTorr at end).
Perhaps worth watching.