From eenriquez at snf.stanford.edu Mon Feb 1 10:33:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Feb 2010 10:33:00 -0800 Subject: Comment pquest SNF 2010-02-01 10:33:00: Completed chamber clean Message-ID: Wet cleaned the chamber and replaced all 4 clamp springs. Ran the Oxygen 3 recipe. From jimkruger at snf.stanford.edu Wed Feb 3 18:05:53 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 3 Feb 2010 18:05:53 -0800 Subject: Shutdown pquest SNF 2010-02-03 18:05:52: Broken wafer in system Message-ID: "left" clamp bit off a small piece of 1 st wafer. Chip was outside of O-ringarea.. He leak test wafer then gave 3.5 sccm, maybe usable, but that wafer shattered on attempting unload. Sorry From tdo at snf.stanford.edu Thu Feb 4 13:57:34 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 4 Feb 2010 13:57:34 -0800 Subject: Shutdown pquest SNF 2010-02-03 18:05:52: Broken wafer in system Message-ID: removed From wanki at snf.stanford.edu Thu Feb 11 23:30:28 2010 From: wanki at snf.stanford.edu (wanki at snf.stanford.edu) Date: Thu, 11 Feb 2010 23:30:28 -0800 Subject: Problem pquest SNF 2010-02-11 23:30:28: Computer is not working Message-ID: Computer of PQuest is not working now. So, I could not do anything including editing recipes. From cbaxter at snf.stanford.edu Sun Feb 14 21:30:20 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 14 Feb 2010 21:30:20 -0800 Subject: Comment pquest SNF 2010-02-14 21:30:20: PC problem Message-ID: System will not boot up right.. still trouble shooting... From eenriquez at snf.stanford.edu Tue Feb 16 14:43:20 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:43:20 -0800 Subject: Problem pquest SNF 2010-02-11 23:30:28: Computer is not working Message-ID: Reset computer. From eenriquez at snf.stanford.edu Tue Feb 16 14:43:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:43:30 -0800 Subject: Comment pquest SNF 2010-02-14 21:30:20: PC problem Message-ID: Archive From eenriquez at snf.stanford.edu Tue Feb 16 14:43:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:43:38 -0800 Subject: Comment pquest SNF 2010-02-01 10:33:00: Completed chamber clean Message-ID: Archive From eenriquez at snf.stanford.edu Tue Feb 16 14:46:54 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:46:54 -0800 Subject: Comment pquest SNF 2010-02-16 14:46:54: Completed wet clean Message-ID: Completed wet clean. Added teflon pieces to the clamp to try to eliminate the intermittent wafer breakages. From jimkruger at snf.stanford.edu Tue Feb 16 19:06:13 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 16 Feb 2010 19:06:13 -0800 Subject: Comment pquest SNF 2010-02-16 19:06:13: PQ Looks OK after wet clean Message-ID: Leak up rate about 0.6 mTorr / min., very good. He blow-by = 1.5 sccm on known good wafer, see 3 or 4 on rother wafers. OK. From arkam at snf.stanford.edu Sun Feb 21 10:47:21 2010 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sun, 21 Feb 2010 10:47:21 -0800 Subject: Problem pquest SNF 2010-02-21 10:47:20: I cam and found the system in service mode--do not know whow to get out of it Message-ID: From eenriquez at snf.stanford.edu Mon Feb 22 10:10:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Feb 2010 10:10:47 -0800 Subject: Problem pquest SNF 2010-02-21 10:47:20: I cam and found the system in service mode--do not know whow to get out of it Message-ID: Exited from the Service screen. Ran Oxygen3 recipe