Shutdown pquest SNF 2010-02-03 18:05:52: Broken wafer in system

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Wed Feb 3 18:05:53 PST 2010


"left" clamp bit off a small piece of 1 st wafer. Chip was outside of O-ringarea..
He leak test wafer then gave 3.5 sccm, maybe usable,  but that wafer shattered on attempting unload.
Sorry




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