Comment pquest SNF 2010-02-16 19:06:13: PQ Looks OK after wet clean

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue Feb 16 19:06:13 PST 2010


Leak up rate about 0.6 mTorr / min.,  very good.
He blow-by = 1.5 sccm on known good wafer, see 3 or 4 on rother wafers.  OK.




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