From cbaxter at snf.stanford.edu Fri Jul 2 03:50:24 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 2 Jul 2010 03:50:24 -0700 Subject: Problem pquest SNF 2010-06-29 12:54:05: Computer error Message-ID: From tdo at snf.stanford.edu Tue Jul 6 10:02:10 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 6 Jul 2010 10:02:10 -0700 Subject: Comment pquest SNF 2010-04-19 14:40:21: Completed wetclean Message-ID: archive From tdo at snf.stanford.edu Tue Jul 6 10:02:21 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 6 Jul 2010 10:02:21 -0700 Subject: Comment pquest SNF 2010-05-03 10:59:16: Completed wet clean Message-ID: archive From tdo at snf.stanford.edu Tue Jul 6 10:02:30 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 6 Jul 2010 10:02:30 -0700 Subject: Comment pquest SNF 2010-05-17 12:39:18: Wet clean complete Message-ID: archive From tdo at snf.stanford.edu Tue Jul 6 10:02:56 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 6 Jul 2010 10:02:56 -0700 Subject: Comment pquest SNF 2010-05-16 12:29:12: Please watch Cl2 Message-ID: archive From tdo at snf.stanford.edu Tue Jul 6 10:03:08 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 6 Jul 2010 10:03:08 -0700 Subject: Comment pquest SNF 2010-05-28 12:28:20: OK after broken wafer cleanup Message-ID: archive From mtang at snf.stanford.edu Thu Jul 8 15:53:09 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 8 Jul 2010 15:53:09 -0700 Subject: Comment pquest SNF 2010-07-08 15:53:08: Turbo was off Message-ID: User reported high pressure problem. Jim Kruger came to the rescue. He found the turbo pump was off although there was no apparent reason. He restarted, waited for 10 minutes to come up to speed, and system is now OK. (Thanks Jim!) From eenriquez at snf.stanford.edu Mon Jul 12 12:41:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:41:56 -0700 Subject: Comment pquest SNF 2010-07-08 15:53:08: Turbo was off Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:42:03 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:42:03 -0700 Subject: Comment pquest SNF 2010-06-21 13:22:22: Wet cleaned the chamber Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:42:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:42:19 -0700 Subject: Comment pquest SNF 2010-07-12 12:42:19: Wet clean completed Message-ID: From eenriquez at snf.stanford.edu Mon Jul 12 13:28:05 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 13:28:05 -0700 Subject: Comment pquest SNF 2010-06-16 09:14:44: Message-ID: Archived From bajcsy at snf.stanford.edu Sun Jul 18 14:09:31 2010 From: bajcsy at snf.stanford.edu (bajcsy at snf.stanford.edu) Date: Sun, 18 Jul 2010 14:09:31 -0700 Subject: Shutdown pquest SNF 2010-07-18 14:09:31: wafer fell off during unloading Message-ID: the wafer is not broken, it just fell from the pins From eenriquez at snf.stanford.edu Mon Jul 19 11:06:50 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Jul 2010 11:06:50 -0700 Subject: Shutdown pquest SNF 2010-07-18 14:09:31: wafer fell off during unloading Message-ID: Opened the chamber and recovered the wafer. Cycled a dummy wafer and ran O2 plasma with no problems. From altamash at snf.stanford.edu Fri Jul 23 11:27:44 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Fri, 23 Jul 2010 11:27:44 -0700 Subject: Comment pquest SNF 2010-07-23 11:27:43: Out of log sheets Message-ID: From yspark at snf.stanford.edu Sat Jul 24 22:00:07 2010 From: yspark at snf.stanford.edu (yspark at snf.stanford.edu) Date: Sat, 24 Jul 2010 22:00:07 -0700 Subject: Problem pquest SNF 2010-07-24 22:00:06: RF power Message-ID: No RF power. Microwave looks fine. Recipe: _JKH2AX (RF 175, uWave 500Watt, process pressure 5mTorr) From eenriquez at snf.stanford.edu Mon Jul 26 09:24:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Jul 2010 09:24:51 -0700 Subject: Problem pquest SNF 2010-07-24 22:00:06: RF power Message-ID: No problem found. Ran the Oxygen 3 process with no problems. RF was OK and stable. From bucklesm at snf.stanford.edu Wed Jul 28 13:26:42 2010 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Wed, 28 Jul 2010 13:26:42 -0700 Subject: Comment pquest SNF 2010-07-28 13:26:42: need more log book pages Message-ID: From mdickey at snf.stanford.edu Thu Jul 29 06:19:38 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 29 Jul 2010 06:19:38 -0700 Subject: Shutdown pquest SNF 2010-07-29 06:19:37: gas issue Message-ID: Down for gas issues From mdickey at snf.stanford.edu Thu Jul 29 07:55:44 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 29 Jul 2010 07:55:44 -0700 Subject: Shutdown pquest SNF 2010-07-29 06:19:37: gas issue Message-ID: HBR and Chlorine not available From eenriquez at snf.stanford.edu Thu Jul 29 11:38:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Jul 2010 11:38:51 -0700 Subject: Shutdown pquest SNF 2010-07-29 11:38:50: Sensor problem Message-ID: Arm and clamp position sensors are intermittent. From eenriquez at snf.stanford.edu Thu Jul 29 14:48:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Jul 2010 14:48:21 -0700 Subject: Shutdown pquest SNF 2010-07-29 11:38:50: Sensor problem Message-ID: Reset the system. Cycled clamp and load arms may times without a problem.