Shutdown pquest SNF 2010-07-18 14:09:31: wafer fell off during unloading

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 19 11:06:50 PDT 2010


Opened the chamber and recovered the wafer.  Cycled a dummy wafer and ran O2 plasma with no problems.




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