Comment pquest SNF 2010-07-23 11:27:43: Out of log sheets
altamash at snf.stanford.edu
altamash at snf.stanford.edu
Fri Jul 23 11:27:44 PDT 2010
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Shutdown pquest SNF 2010-07-18 14:09:31: wafer fell off during unloading
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Problem pquest SNF 2010-07-24 22:00:06: RF power
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Shutdown pquest SNF 2010-07-18 14:09:31: wafer fell off during unloading
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Problem pquest SNF 2010-07-24 22:00:06: RF power
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