From yinliu at snf.stanford.edu Tue Jun 1 01:41:34 2010 From: yinliu at snf.stanford.edu (yinliu at snf.stanford.edu) Date: Tue, 1 Jun 2010 01:41:34 -0700 Subject: Shutdown pquest SNF 2010-06-01 01:41:34: wafer lost inside chamber Message-ID: when process finished, the wafer lost inside the chamber. Please keep the wafer outside chamber after maintainess. Thanks! From eenriquez at snf.stanford.edu Tue Jun 1 11:08:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Jun 2010 11:08:29 -0700 Subject: Shutdown pquest SNF 2010-06-01 01:41:34: wafer lost inside chamber Message-ID: Recovered the user's wafer. It looks like the clamp finger opposite the flat pinched the wafer. Adjusted the wafer position and cycled a wafer with no problems. From zzp at snf.stanford.edu Tue Jun 1 11:37:05 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Tue, 1 Jun 2010 11:37:05 -0700 Subject: Shutdown pquest SNF 2010-06-01 11:37:03: wafer broken inside Message-ID: From eenriquez at snf.stanford.edu Tue Jun 1 14:47:45 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Jun 2010 14:47:45 -0700 Subject: Shutdown pquest SNF 2010-06-01 14:47:44: Handling problem Message-ID: Need to troubleshoot tomorrow. From eenriquez at snf.stanford.edu Wed Jun 2 18:39:46 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Jun 2010 18:39:46 -0700 Subject: Shutdown pquest SNF 2010-06-01 14:47:44: Handling problem Message-ID: Added teflon shim to the teflon clamp padding to help reduce the possibility of the metal part of the clamp from contacting the wafer. Loaded and unloaded several wafers with no problems. From eenriquez at snf.stanford.edu Wed Jun 2 18:40:22 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Jun 2010 18:40:22 -0700 Subject: Shutdown pquest SNF 2010-06-01 11:37:03: wafer broken inside Message-ID: Cleaned the chamber. Added teflon shim to the teflon clamp padding to help reduce the possibility of the metal part of the clamp from contacting the wafer. Loaded and unloaded several wafers with no problems. From eenriquez at snf.stanford.edu Wed Jun 2 18:40:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Jun 2010 18:40:58 -0700 Subject: Comment pquest SNF 2010-05-30 10:26:42: pquest shutdown Message-ID: Recovered the user's wafer pieces. From vijayn at snf.stanford.edu Fri Jun 4 07:03:27 2010 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Fri, 4 Jun 2010 07:03:27 -0700 Subject: Problem pquest SNF 2010-06-04 07:03:27: Water Leak Message-ID: Ran pquest in hot mode (using gas instead of water flow). Did the following: 1) Turned on purifier bypass. 2) Turned off chiller. 3) Turned on gas at wall. 4) Swtiched valve to gas position. Water bubbled as normal. Ran pquest for ~ 30 mins using my standard etches. Noticed pool of water in front of machine coming from plastic enclosure under chiller. Water level in the chiller has appeared to fall since the start of the process. Tried to soak up as much water as possible using cleanroom wipes to avoid shorting electrical equipment. From vijayn at snf.stanford.edu Fri Jun 4 07:12:00 2010 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Fri, 4 Jun 2010 07:12:00 -0700 Subject: Shutdown pquest SNF 2010-06-04 07:12:00: Water Leak Message-ID: Ran pquest in hot mode at 200C (using gas instead of water flow). Did the following (as per Jim Kruger's instructions): 1) Turned on purifier bypass. 2) Turned off chiller. 3) Turned on gas at wall. 4) Swtiched valve to gas position. Water bubbled as normal. Ran pquest for ~ 30 mins using my standard GaAs etches. Noticed pool of water in front of machine coming from plastic enclosure under chiller. Water level in the chiller has appeared to fall since the start of the process. Tried to soak up as much water as possible using cleanroom wipes to avoid shorting electrical equipment. From eenriquez at snf.stanford.edu Fri Jun 4 09:01:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Jun 2010 09:01:49 -0700 Subject: Shutdown pquest SNF 2010-06-04 07:12:00: Water Leak Message-ID: Water leak was caused by the chiller being too full. When the user configured the cooling lines for running the electrode hot, the entire content of the cooling lines was dumped into the chiller. From eenriquez at snf.stanford.edu Fri Jun 4 09:01:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Jun 2010 09:01:53 -0700 Subject: Problem pquest SNF 2010-06-04 07:03:27: Water Leak Message-ID: Water leak was caused by the chiller being too full. When the user configured the cooling lines for running the electrode hot, the entire content of the cooling lines was dumped into the chiller. From mahnaz at snf.stanford.edu Wed Jun 16 09:14:44 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jun 2010 09:14:44 -0700 Subject: Comment pquest SNF 2010-06-16 09:14:44: Message-ID: Mike, Elmer and Mario Changed the secondary container which was leaking. From altamash at snf.stanford.edu Wed Jun 16 21:05:21 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Wed, 16 Jun 2010 21:05:21 -0700 Subject: Comment pquest SNF 2010-06-16 21:05:21: LED Flashlight flickering:Maybe low battery Message-ID: From eenriquez at snf.stanford.edu Mon Jun 21 13:22:22 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jun 2010 13:22:22 -0700 Subject: Comment pquest SNF 2010-06-21 13:22:22: Wet cleaned the chamber Message-ID: From eenriquez at snf.stanford.edu Tue Jun 22 08:03:11 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jun 2010 08:03:11 -0700 Subject: Problem pquest SNF 2010-04-15 13:24:27: still in test mode Message-ID: New oring working well. From arkam at snf.stanford.edu Tue Jun 29 08:42:38 2010 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Tue, 29 Jun 2010 08:42:38 -0700 Subject: Shutdown pquest SNF 2010-06-29 08:42:37: Computer Error Message-ID: I wanted to change the RF of my recipe. It did not change and showing a system error. I think it is a software error and probably needs a restart of the computer. From tdo at snf.stanford.edu Tue Jun 29 12:53:07 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 29 Jun 2010 12:53:07 -0700 Subject: Shutdown pquest SNF 2010-06-29 08:42:37: Computer Error Message-ID: Found that both Windows and the Control Program was shut down (computer was at C prompt). Restarted both and ran Oxygen3 recipe -- everything appears fine. Proceed with caution -- not sure what caused the error. From tdo at snf.stanford.edu Tue Jun 29 12:54:06 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 29 Jun 2010 12:54:06 -0700 Subject: Problem pquest SNF 2010-06-29 12:54:05: Computer error Message-ID: Not sure what caused the computer error earlier today, but the machine is working now after resetting the program. Proceed with caution.