Shutdown pquest SNF 2010-06-01 01:41:34: wafer lost inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jun 1 11:08:29 PDT 2010


Recovered the user's wafer.  It looks like the clamp finger opposite the flat pinched the wafer.   Adjusted the wafer position and cycled a wafer with no problems.  




More information about the pquest-pcs mailing list