Shutdown pquest SNF 2010-06-01 14:47:44: Handling problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 2 18:39:46 PDT 2010


Added teflon shim to the teflon clamp padding to help reduce the possibility of the metal part of the clamp from contacting the wafer.
Loaded and unloaded several wafers with no problems.




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