Shutdown pquest SNF 2010-06-01 11:37:03: wafer broken inside

eenriquez at eenriquez at
Wed Jun 2 18:40:22 PDT 2010

Cleaned the chamber.
Added teflon shim to the teflon clamp padding to help reduce the possibility of the metal part of the clamp from contacting the wafer.
Loaded and unloaded several wafers with no problems.

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