Problem pquest SNF 2010-06-04 07:03:27: Water Leak

vijayn at snf.stanford.edu vijayn at snf.stanford.edu
Fri Jun 4 07:03:27 PDT 2010


Ran pquest in hot mode (using gas instead of water flow).  Did the following:
1) Turned on purifier bypass.
2) Turned off chiller.
3) Turned on gas at wall.
4) Swtiched valve to gas position.  Water bubbled as normal.
Ran pquest for ~ 30 mins using my standard etches.  Noticed pool of water in front of machine coming from plastic enclosure under chiller.  Water level in the chiller has appeared to fall since the start of the process.  Tried to soak up as much water as possible using cleanroom wipes to avoid shorting electrical equipment. 




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