From jimkruger at snf.stanford.edu Mon Mar 1 12:15:40 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 1 Mar 2010 12:15:40 -0800 Subject: Comment pquest SNF 2010-03-01 12:15:39: PQ OK to use (Cl2 week) after wet clean Message-ID: He blow-by = 1.5 sccm, Leak-up = 0.65 mT/min., very good. As always, wtch the VAT pressure for zero drift. jim From bryane at snf.stanford.edu Mon Mar 8 00:59:54 2010 From: bryane at snf.stanford.edu (bryane at snf.stanford.edu) Date: Mon, 8 Mar 2010 00:59:54 -0800 Subject: Shutdown pquest SNF 2010-03-08 00:59:53: broken wafer Message-ID: My wafer broke upon unloading from the chamber From eenriquez at snf.stanford.edu Mon Mar 8 11:43:25 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Mar 2010 11:43:25 -0800 Subject: Shutdown pquest SNF 2010-03-08 00:59:53: broken wafer Message-ID: Cleaned chamber and ran the O3 recipe. Also replaced the cooling water DI filter. From zzp at snf.stanford.edu Fri Mar 12 00:19:03 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 12 Mar 2010 00:19:03 -0800 Subject: Problem pquest SNF 2010-03-12 00:19:03: Wafer broken inside the chamber Message-ID: One part of the wafer near the flat was left in the chamber. From zzp at snf.stanford.edu Fri Mar 12 00:21:09 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 12 Mar 2010 00:21:09 -0800 Subject: Shutdown pquest SNF 2010-03-12 00:21:09: some pieces left in the chamber Message-ID: The wafer was broken inside the chamber and one part near the flat was in the chamber. From eenriquez at snf.stanford.edu Fri Mar 12 15:52:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Mar 2010 15:52:24 -0800 Subject: Comment pquest SNF 2010-03-12 15:52:23: Update Message-ID: System not sensing the arm position sensor (micro switches) and the clamp position sensors. Power ( 5, 15 and 24 VDC) to the motor drive controller checked OK. Might be a bad opto coupler (MOC8112). Need to troubleshoot further. From eenriquez at snf.stanford.edu Mon Mar 15 14:58:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Mar 2010 14:58:35 -0700 Subject: Comment pquest SNF 2010-03-15 14:58:34: Update Message-ID: Cleaned connectors inside the motor controller chassis. Now handler and clamp works fine. Cleaned the chamber. Ran Oxygen3 recipe. Backside He cooling flow is too high. Need to reopen the chamber to check the springs and o-ring. From eenriquez at snf.stanford.edu Tue Mar 16 09:56:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Mar 2010 09:56:29 -0700 Subject: Comment pquest SNF 2010-03-15 14:58:34: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 16 09:56:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Mar 2010 09:56:38 -0700 Subject: Comment pquest SNF 2010-03-12 15:52:23: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 16 09:57:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Mar 2010 09:57:00 -0700 Subject: Shutdown pquest SNF 2010-03-12 00:21:09: some pieces left in the chamber Message-ID: Cleaned connectors inside the motor controller chassis. Now handler and clamp works fine. Cleaned the chamber. Ran Oxygen3 recipe. Backside He cooling flow is about 2.8 sccm. From eenriquez at snf.stanford.edu Tue Mar 16 10:09:01 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Mar 2010 10:09:01 -0700 Subject: Problem pquest SNF 2010-03-12 00:19:03: Wafer broken inside the chamber Message-ID: Cleaned connectors inside the motor controller chassis. Now handler and clamp works fine. Cleaned the chamber. Ran Oxygen3 recipe. Backside He cooling flow is about 2.8 sccm. From chingmei at snf.stanford.edu Tue Mar 16 14:03:01 2010 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Tue, 16 Mar 2010 14:03:01 -0700 Subject: Shutdown pquest SNF 2010-03-16 14:03:00: wafer broken inside Message-ID: The wafer was broken when unloaded at the second round unknownly. The He flow kept up to 5sccm in both rounds. Sorry about the inconvenience. From eenriquez at snf.stanford.edu Wed Mar 17 19:20:50 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Mar 2010 19:20:50 -0700 Subject: Comment pquest SNF 2010-03-17 19:20:49: Update Message-ID: Releveled the clamp, replaced the backside He o-ring, reduced the clamping force but the clamp still intermittently breaks the wafer. Still troubleshooting. From eenriquez at snf.stanford.edu Thu Mar 18 14:52:18 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Mar 2010 14:52:18 -0700 Subject: Shutdown pquest SNF 2010-03-16 14:03:00: wafer broken inside Message-ID: Adjusted the wafer hand-off position on the electrode. The wafer was being loaded too far in and the it end up on the ridge near the outer perimeter of the electrode. The wafer broke when the clamp presses down on the wafer while it is hung-up on the ridge. From eenriquez at snf.stanford.edu Thu Mar 18 14:53:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Mar 2010 14:53:51 -0700 Subject: Comment pquest SNF 2010-03-17 19:20:49: Update Message-ID: Load and unloaded wafer 10 times without fail. Ran the Oxygen3 recipe. Helium leak rate is 0.2 sccm !!! From jimkruger at snf.stanford.edu Fri Mar 19 11:32:18 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 19 Mar 2010 11:32:18 -0700 Subject: Problem pquest SNF 2010-03-19 11:32:18: Laser endpoint DVM intermittant Message-ID: zzp changed the battery but the meter seems intermintant, at least the display. Pleas handle very carefully. jimkruger From tzhu at snf.stanford.edu Fri Mar 19 13:27:40 2010 From: tzhu at snf.stanford.edu (tzhu at snf.stanford.edu) Date: Fri, 19 Mar 2010 13:27:40 -0700 Subject: Problem pquest SNF 2010-03-19 13:27:39: can not load in Message-ID: Seems the load pressure are not low enough to send the wafer to chamber. so have to quit now. From eenriquez at snf.stanford.edu Fri Mar 19 13:59:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Mar 2010 13:59:09 -0700 Subject: Problem pquest SNF 2010-03-19 11:32:18: Laser endpoint DVM intermittant Message-ID: Jim fixed loose battery. From eenriquez at snf.stanford.edu Fri Mar 19 14:02:40 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Mar 2010 14:02:40 -0700 Subject: Problem pquest SNF 2010-03-19 13:27:39: can not load in Message-ID: User tried to load a quartz wafer. Wafer sensor (top of LL lid) unable to "see" the wafer. From bryane at snf.stanford.edu Fri Mar 19 16:57:13 2010 From: bryane at snf.stanford.edu (bryane at snf.stanford.edu) Date: Fri, 19 Mar 2010 16:57:13 -0700 Subject: Shutdown pquest SNF 2010-03-19 16:57:13: wafer fell off pins Message-ID: the wafer fell off the pins during an unload. I stopped the arm before the wafer broke, but the wafer is sitting on only one pin From cbaxter at snf.stanford.edu Sat Mar 20 08:32:43 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 20 Mar 2010 08:32:43 -0700 Subject: Shutdown pquest SNF 2010-03-19 16:57:13: wafer fell off pins Message-ID: Vented chamber and removed wafer on chuck., also wiped down chamber with water and ipa... From mkseo at snf.stanford.edu Tue Mar 23 18:54:20 2010 From: mkseo at snf.stanford.edu (mkseo at snf.stanford.edu) Date: Tue, 23 Mar 2010 18:54:20 -0700 Subject: Shutdown pquest SNF 2010-03-23 18:54:20: wafer was broken Message-ID: During unload, the wafer was broken. He flow was 6.1. From eenriquez at snf.stanford.edu Wed Mar 24 17:01:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Mar 2010 17:01:35 -0700 Subject: Shutdown pquest SNF 2010-03-23 18:54:20: wafer was broken Message-ID: Cleaned the chamber. Adjusted the pin orientation. Ran Oxygen3 recipe. From zzp at snf.stanford.edu Thu Mar 25 00:53:00 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Thu, 25 Mar 2010 00:53:00 -0700 Subject: Shutdown pquest SNF 2010-03-25 00:52:59: wafer broken inside Message-ID: From eenriquez at snf.stanford.edu Thu Mar 25 13:06:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Mar 2010 13:06:19 -0700 Subject: Shutdown pquest SNF 2010-03-25 00:52:59: wafer broken inside Message-ID: Cleaned the chamber. Did not notice any problem. Its possible that the wafer is sticking to the new o-ring. Running a 5 minute Oxygen plasma without a wafer might help. Please visually check your wafer before unloading and write your observations in coral. From tdo at snf.stanford.edu Tue Mar 30 19:49:12 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 30 Mar 2010 19:49:12 -0700 Subject: Problem pquest SNF 2010-03-30 19:49:11: High He blow-by Message-ID: For the past 2-3 days, users have been logging He flows >7sccm From tdo at snf.stanford.edu Tue Mar 30 23:00:18 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 30 Mar 2010 23:00:18 -0700 Subject: Problem pquest SNF 2010-03-30 23:00:18: Observed unstable ECR Power Message-ID: During my etch (recipe ethrush2), when I optimized the microwave tuning for minimal reverse power, I observed the reverse power fluctuating between 0 and 20W (back and forth). The plasma was also flickering. To stabilize the plasma, I had to detune the reverse power to about 15W. From tdo at snf.stanford.edu Tue Mar 30 23:01:12 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 30 Mar 2010 23:01:12 -0700 Subject: Problem pquest SNF 2010-03-30 23:01:12: Wafer popping on unload Message-ID: The wafer is popping when unloading after an etch. It bounces up and down when the pins begin to lift it -- fortunately, it lands back on the pins. From yiyang at snf.stanford.edu Wed Mar 31 21:53:08 2010 From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu) Date: Wed, 31 Mar 2010 21:53:08 -0700 Subject: Shutdown pquest SNF 2010-03-31 21:53:07: pump failure Message-ID: the vacuum box has a red light lit, and the main chamber isn't getting pumped down (at 90 mtorr). I think I heard the turbo whirring down. The pressure interlock error message on the program front screen is also red. From yiyang at snf.stanford.edu Wed Mar 31 22:07:56 2010 From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu) Date: Wed, 31 Mar 2010 22:07:56 -0700 Subject: Comment pquest SNF 2010-03-31 22:07:56: pump Message-ID: I've also left the load lock unpumped because I don't know the state of the load lock vacuum