Shutdown pquest SNF 2010-03-08 00:59:53: broken wafer
bryane at snf.stanford.edu
bryane at snf.stanford.edu
Mon Mar 8 00:59:54 PST 2010
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Comment pquest SNF 2010-03-01 12:15:39: PQ OK to use (Cl2 week) after wet clean
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Shutdown pquest SNF 2010-03-08 00:59:53: broken wafer
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My wafer broke upon unloading from the chamber
Previous message:
Comment pquest SNF 2010-03-01 12:15:39: PQ OK to use (Cl2 week) after wet clean
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Shutdown pquest SNF 2010-03-08 00:59:53: broken wafer
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