Problem pquest SNF 2010-03-12 00:19:03: Wafer broken inside the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 16 10:09:01 PDT 2010


Cleaned connectors inside the motor controller chassis.  Now handler and clamp works fine.  Cleaned the chamber.  Ran Oxygen3 recipe.  Backside He cooling flow is about 2.8 sccm.




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