Shutdown pquest SNF 2010-03-16 14:03:00: wafer broken inside

chingmei at snf.stanford.edu chingmei at snf.stanford.edu
Tue Mar 16 14:03:01 PDT 2010


The wafer was broken when unloaded at the second round unknownly. The He flow kept up to 5sccm in both rounds. Sorry about the inconvenience.




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