Comment pquest SNF 2010-03-17 19:20:49: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Mar 17 19:20:50 PDT 2010
Releveled the clamp, replaced the backside He o-ring, reduced the clamping force but the clamp still intermittently breaks the wafer. Still troubleshooting.
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