Shutdown pquest SNF 2010-03-16 14:03:00: wafer broken inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 18 14:52:18 PDT 2010


Adjusted the wafer hand-off position on the electrode.  The wafer was being loaded too far in and the it end up on the ridge near the outer perimeter of the electrode.  The wafer broke when the clamp presses down on the wafer while it is hung-up on the ridge.




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