Comment pquest SNF 2010-03-17 19:20:49: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 18 14:53:51 PDT 2010

Previous message: Comment pquest SNF 2010-03-17 19:20:49: Update
Next message: Problem pquest SNF 2010-03-19 11:32:18: Laser endpoint DVM intermittant
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Load and unloaded wafer 10 times without fail.  Ran the Oxygen3 recipe.  Helium leak rate is 0.2 sccm !!!

Previous message: Comment pquest SNF 2010-03-17 19:20:49: Update
Next message: Problem pquest SNF 2010-03-19 11:32:18: Laser endpoint DVM intermittant
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the pquest-pcs mailing list