Comment pquest SNF 2010-03-17 19:20:49: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 18 14:53:51 PDT 2010


Load and unloaded wafer 10 times without fail.  Ran the Oxygen3 recipe.  Helium leak rate is 0.2 sccm !!!




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