Shutdown pquest SNF 2010-03-25 00:52:59: wafer broken inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 25 13:06:19 PDT 2010


Cleaned the chamber.  Did not notice any problem.  Its possible that the wafer is sticking to the new o-ring.   Running a 5 minute Oxygen plasma without a wafer might help.  Please visually check your wafer before unloading and write your observations in coral.




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