Shutdown pquest SNF 2010-03-25 00:52:59: wafer broken inside

eenriquez at eenriquez at
Thu Mar 25 13:06:19 PDT 2010

Cleaned the chamber.  Did not notice any problem.  Its possible that the wafer is sticking to the new o-ring.   Running a 5 minute Oxygen plasma without a wafer might help.  Please visually check your wafer before unloading and write your observations in coral.

More information about the pquest-pcs mailing list