Problem pquest SNF 2010-03-30 19:49:11: High He blow-by
tdo at snf.stanford.edu
tdo at snf.stanford.edu
Tue Mar 30 19:49:12 PDT 2010
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Shutdown pquest SNF 2010-03-25 00:52:59: wafer broken inside
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Problem pquest SNF 2010-03-30 23:00:18: Observed unstable ECR Power
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For the past 2-3 days, users have been logging He flows >7sccm
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Shutdown pquest SNF 2010-03-25 00:52:59: wafer broken inside
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Problem pquest SNF 2010-03-30 23:00:18: Observed unstable ECR Power
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