Problem pquest SNF 2010-03-30 23:01:12: Wafer popping on unload

tdo at tdo at
Tue Mar 30 23:01:12 PDT 2010

The wafer is popping when unloading after an etch.  It bounces up and down when the pins begin to lift it -- fortunately, it lands back on the pins.  

More information about the pquest-pcs mailing list