Problem pquest SNF 2010-03-30 23:01:12: Wafer popping on unload

tdo at snf.stanford.edu tdo at snf.stanford.edu
Tue Mar 30 23:01:12 PDT 2010


The wafer is popping when unloading after an etch.  It bounces up and down when the pins begin to lift it -- fortunately, it lands back on the pins.  




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