From tdo at snf.stanford.edu Sun May 2 12:20:40 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 2 May 2010 12:20:40 -0700 Subject: Problem pquest SNF 2010-05-02 12:20:39: ECR Reverse power unstable Message-ID: Still had same problem of unstable reverse ECR power (varies +/-5-10W), with a noticeable flicker in the plasma brightness during GaAs etch. I'll grab McVitte one day to take a look to see if I'm crazy. From tdo at snf.stanford.edu Sun May 2 12:22:28 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 2 May 2010 12:22:28 -0700 Subject: Comment pquest SNF 2010-05-02 12:22:28: GaAs Etch Rate 118nm/mins Message-ID: GaAs Etch Rate 118 nm/mins - mounted with copper tape - 400W ECR, 44 W RF, -40V - 13C chuck, - 2..1mTorr - Ar / BCl3 / Cl2: 15/10/1.5 sccm - He blow-by 5.2-.54 sccm From tdo at snf.stanford.edu Sun May 2 12:22:57 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 2 May 2010 12:22:57 -0700 Subject: Comment pquest SNF 2010-02-16 19:06:13: PQ Looks OK after wet clean Message-ID: From tdo at snf.stanford.edu Sun May 2 12:23:07 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 2 May 2010 12:23:07 -0700 Subject: Comment pquest SNF 2010-03-01 12:15:39: PQ OK to use (Cl2 week) after wet clean Message-ID: From tdo at snf.stanford.edu Sun May 2 12:23:34 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 2 May 2010 12:23:34 -0700 Subject: Comment pquest SNF 2010-02-16 14:46:54: Completed wet clean Message-ID: From eenriquez at snf.stanford.edu Mon May 3 10:59:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 May 2010 10:59:17 -0700 Subject: Comment pquest SNF 2010-05-03 10:59:16: Completed wet clean Message-ID: From tdo at snf.stanford.edu Fri May 14 10:19:31 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Fri, 14 May 2010 10:19:31 -0700 Subject: Problem pquest SNF 2010-05-14 10:19:31: He leak high Message-ID: He leak rate has inched upwards -- now at 8.2sccm. Is it possible to change the o-ring during the wet clean Monday? From yjhuo at snf.stanford.edu Sat May 15 20:45:41 2010 From: yjhuo at snf.stanford.edu (yjhuo at snf.stanford.edu) Date: Sat, 15 May 2010 20:45:41 -0700 Subject: Shutdown pquest SNF 2010-05-15 20:45:40: transfer arm at home sensor does work Message-ID: The transfer arm is at home postion, but the sensor doesn't response to that. I couldn't do system reset, LL --> ATM and other processes. So, no wafer can be loaded at this time. System is under idle mode now. From cbaxter at snf.stanford.edu Sun May 16 05:07:52 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 16 May 2010 05:07:52 -0700 Subject: Shutdown pquest SNF 2010-05-15 20:45:40: transfer arm at home sensor does work Message-ID: System pc locked up, rebooted system and cycled wafers without problem. From mtang at snf.stanford.edu Sun May 16 12:29:13 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 16 May 2010 12:29:13 -0700 Subject: Comment pquest SNF 2010-05-16 12:29:12: Please watch Cl2 Message-ID: The chlorine sensor in the vault is showing a lot of noise which could trigger Cl2 shutoff (a new sensor is on order). We don't think it's likely, but please be aware. From jimkruger at snf.stanford.edu Mon May 17 12:39:18 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 17 May 2010 12:39:18 -0700 Subject: Comment pquest SNF 2010-05-17 12:39:18: Wet clean complete Message-ID: Back to Silicone O-ring on chuck but "cooked" at 200C O2 plasma to remove "stickyness". 3 wafers cycled with no problem. From arkam at snf.stanford.edu Thu May 20 08:13:18 2010 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Thu, 20 May 2010 08:13:18 -0700 Subject: Problem pquest SNF 2010-05-20 08:13:17: we are out of log book Message-ID: From zzp at snf.stanford.edu Sun May 23 16:41:45 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 May 2010 16:41:45 -0700 Subject: Shutdown pquest SNF 2010-05-23 16:41:45: wafer broken inside Message-ID: From eenriquez at snf.stanford.edu Mon May 24 11:59:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 May 2010 11:59:02 -0700 Subject: Shutdown pquest SNF 2010-05-23 16:41:45: wafer broken inside Message-ID: Cleaned the chamber. Ran the Oxygen3 recipe with no problems. Cooling helium flow = 1.8sccm From bucklesm at snf.stanford.edu Mon May 24 21:17:00 2010 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Mon, 24 May 2010 21:17:00 -0700 Subject: Shutdown pquest SNF 2010-05-24 21:16:59: error when loading Message-ID: I tried to load a wafer, but pquest never pumped the load lock and it couldn't find load sensor. I pressed esc, and now it is stuck waiting for load lock transfer pressure. From eenriquez at snf.stanford.edu Tue May 25 10:38:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 May 2010 10:38:49 -0700 Subject: Shutdown pquest SNF 2010-05-24 21:16:59: error when loading Message-ID: No problem found. I pressed ESC to stop the current task. Loaded a wafer and ran process several times with no problems. From xhlim at snf.stanford.edu Tue May 25 19:11:15 2010 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Tue, 25 May 2010 19:11:15 -0700 Subject: Shutdown pquest SNF 2010-05-25 19:11:15: 2 tiny broken shreds on platform in chamber Message-ID: When unloading, wafer was slightly misaligned with the pins, and the clamp broke off a little bit of the top part of the wafer. (I left the wafer behind as reference if it helps to know how it broke.) There are 2 small broken shreds left in the chamber, and needs to be cleaned away before loading any more samples. From eenriquez at snf.stanford.edu Wed May 26 12:20:44 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 May 2010 12:20:44 -0700 Subject: Shutdown pquest SNF 2010-05-25 19:11:15: 2 tiny broken shreds on platform in chamber Message-ID: Cleaned the chamber and verified the wafer hand-off position. No problems found. From yinliu at snf.stanford.edu Thu May 27 20:31:34 2010 From: yinliu at snf.stanford.edu (yinliu at snf.stanford.edu) Date: Thu, 27 May 2010 20:31:34 -0700 Subject: Shutdown pquest SNF 2010-05-27 20:31:33: broken wafer inside chamber Message-ID: The robot arm cracked my wafer inside chamber. From jimkruger at snf.stanford.edu Fri May 28 12:28:20 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 28 May 2010 12:28:20 -0700 Subject: Comment pquest SNF 2010-05-28 12:28:20: OK after broken wafer cleanup Message-ID: Root cause was likely recipe error in setup loading; new user. Ran Oxygen3 twice, 2 load/unloads OK. He = ~ 3 sccm jimk From mtang at snf.stanford.edu Fri May 28 13:17:37 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 28 May 2010 13:17:37 -0700 Subject: Shutdown pquest SNF 2010-05-27 20:31:33: broken wafer inside chamber Message-ID: Elmer cleaned this up. Jim determined it was a procedural problem that caused the breakage. System is OK. From yinliu at snf.stanford.edu Fri May 28 21:06:32 2010 From: yinliu at snf.stanford.edu (yinliu at snf.stanford.edu) Date: Fri, 28 May 2010 21:06:32 -0700 Subject: Shutdown pquest SNF 2010-05-28 21:06:32: a piece of wafer broken inside Message-ID: when loading the wafer from LL to Chamber, a piece of wafer broken down and left at one of pin position. From cbaxter at snf.stanford.edu Sat May 29 08:19:53 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 29 May 2010 08:19:53 -0700 Subject: Shutdown pquest SNF 2010-05-28 21:06:32: a piece of wafer broken inside Message-ID: Recovered broken wafer chip inside the chamber. From bucklesm at snf.stanford.edu Sun May 30 09:49:51 2010 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Sun, 30 May 2010 09:49:51 -0700 Subject: Shutdown pquest SNF 2010-05-30 09:49:50: problem unloading Message-ID: Wafer fell off the pins while unloading. The wafer is still in pquest. From bucklesm at snf.stanford.edu Sun May 30 10:26:43 2010 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Sun, 30 May 2010 10:26:43 -0700 Subject: Comment pquest SNF 2010-05-30 10:26:42: pquest shutdown Message-ID: The chip on my wafer is valuable and I'd be grateful if when it is removed from pquest it could be put in the box next to pquest. Thanks a lot, Sonia From cbaxter at snf.stanford.edu Mon May 31 17:34:35 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 31 May 2010 17:34:35 -0700 Subject: Shutdown pquest SNF 2010-05-30 09:49:50: problem unloading Message-ID: Recovered wafer from chamber, found vesple lifter pin was out of alignment, corrected vesple pin and cycled load and unload w/out problem.