Problem pquest SNF 2010-05-02 12:20:39: ECR Reverse power unstable

tdo at snf.stanford.edu tdo at snf.stanford.edu
Sun May 2 12:20:40 PDT 2010


Still had same problem of unstable reverse ECR power (varies +/-5-10W), with a noticeable flicker in the plasma brightness during GaAs etch.  I'll grab McVitte one day to take a look to see if I'm crazy.




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