Comment pquest SNF 2010-05-02 12:22:28: GaAs Etch Rate 118nm/mins

tdo at snf.stanford.edu tdo at snf.stanford.edu
Sun May 2 12:22:28 PDT 2010


GaAs Etch Rate 118 nm/mins
- mounted with copper tape
- 400W ECR, 44 W RF, -40V 
- 13C chuck, - 2..1mTorr
- Ar / BCl3 / Cl2:  15/10/1.5 sccm
- He blow-by 5.2-.54 sccm




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