Shutdown pquest SNF 2010-05-15 20:45:40: transfer arm at home sensor does work

yjhuo at snf.stanford.edu yjhuo at snf.stanford.edu
Sat May 15 20:45:41 PDT 2010


The transfer arm is at home postion, but the sensor doesn't  response to that.  I couldn't do system reset, LL --> ATM and other processes. So, no wafer can be loaded at this time.  System is under idle mode now. 




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