Comment pquest SNF 2010-05-17 12:39:18: Wet clean complete

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Mon May 17 12:39:18 PDT 2010


Back to Silicone O-ring on chuck but "cooked" at 200C O2 plasma to remove "stickyness".
3 wafers cycled with no problem.




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