Shutdown pquest SNF 2010-05-23 16:41:45: wafer broken inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 24 11:59:02 PDT 2010


Cleaned the chamber.  Ran the Oxygen3 recipe with no problems.  Cooling helium flow = 1.8sccm




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