Shutdown pquest SNF 2010-05-24 21:16:59: error when loading

bucklesm at bucklesm at
Mon May 24 21:17:00 PDT 2010

I tried to load a wafer, but pquest never pumped the load lock and it couldn't find load sensor.  I pressed esc, and now it is stuck waiting for load lock transfer pressure. 

More information about the pquest-pcs mailing list