Shutdown pquest SNF 2010-05-24 21:16:59: error when loading

bucklesm at snf.stanford.edu bucklesm at snf.stanford.edu
Mon May 24 21:17:00 PDT 2010


I tried to load a wafer, but pquest never pumped the load lock and it couldn't find load sensor.  I pressed esc, and now it is stuck waiting for load lock transfer pressure. 




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