Shutdown pquest SNF 2010-05-25 19:11:15: 2 tiny broken shreds on platform in chamber

xhlim at xhlim at
Tue May 25 19:11:15 PDT 2010

When unloading, wafer was slightly misaligned with the pins, and the clamp broke off a little bit of the top part of the wafer. (I left the wafer behind as reference if it helps to know how it broke.) There are 2 small broken shreds left in the chamber, and needs to be cleaned away before loading any more samples. 

More information about the pquest-pcs mailing list