Shutdown pquest SNF 2010-05-25 19:11:15: 2 tiny broken shreds on platform in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed May 26 12:20:44 PDT 2010


Cleaned the chamber and verified the wafer hand-off position.  No problems found.  




More information about the pquest-pcs mailing list