Comment pquest SNF 2010-05-28 12:28:20: OK after broken wafer cleanup

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Fri May 28 12:28:20 PDT 2010


Root cause was likely recipe error in setup loading; new user.
Ran Oxygen3 twice, 2 load/unloads OK.  He = ~ 3 sccm
jimk




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