Shutdown pquest SNF 2010-05-30 09:49:50: problem unloading
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon May 31 17:34:35 PDT 2010
Recovered wafer from chamber, found vesple lifter pin
was out of alignment, corrected vesple pin and cycled
load and unload w/out problem.
More information about the pquest-pcs
mailing list