May 2010 Archives by date

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Starting: Sun May 2 12:20:40 PDT 2010
Ending: Mon May 31 17:34:35 PDT 2010
Messages: 26

• Problem pquest SNF 2010-05-02 12:20:39: ECR Reverse power unstable   tdo at snf.stanford.edu
• Comment pquest SNF 2010-05-02 12:22:28: GaAs Etch Rate 118nm/mins   tdo at snf.stanford.edu
• Comment pquest SNF 2010-02-16 19:06:13: PQ Looks OK after wet clean   tdo at snf.stanford.edu
• Comment pquest SNF 2010-03-01 12:15:39: PQ OK to use (Cl2 week) after wet clean   tdo at snf.stanford.edu
• Comment pquest SNF 2010-02-16 14:46:54: Completed wet clean   tdo at snf.stanford.edu
• Comment pquest SNF 2010-05-03 10:59:16: Completed wet clean   eenriquez at snf.stanford.edu
• Problem pquest SNF 2010-05-14 10:19:31: He leak high   tdo at snf.stanford.edu
• Shutdown pquest SNF 2010-05-15 20:45:40: transfer arm at home sensor does work   yjhuo at snf.stanford.edu
• Shutdown pquest SNF 2010-05-15 20:45:40: transfer arm at home sensor does work   cbaxter at snf.stanford.edu
• Comment pquest SNF 2010-05-16 12:29:12: Please watch Cl2   mtang at snf.stanford.edu
• Comment pquest SNF 2010-05-17 12:39:18: Wet clean complete   jimkruger at snf.stanford.edu
• Problem pquest SNF 2010-05-20 08:13:17: we are out of log book   arkam at snf.stanford.edu
• Shutdown pquest SNF 2010-05-23 16:41:45: wafer broken inside   zzp at snf.stanford.edu
• Shutdown pquest SNF 2010-05-23 16:41:45: wafer broken inside   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2010-05-24 21:16:59: error when loading   bucklesm at snf.stanford.edu
• Shutdown pquest SNF 2010-05-24 21:16:59: error when loading   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2010-05-25 19:11:15: 2 tiny broken shreds on platform in chamber   xhlim at snf.stanford.edu
• Shutdown pquest SNF 2010-05-25 19:11:15: 2 tiny broken shreds on platform in chamber   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2010-05-27 20:31:33: broken wafer inside chamber   yinliu at snf.stanford.edu
• Comment pquest SNF 2010-05-28 12:28:20: OK after broken wafer cleanup   jimkruger at snf.stanford.edu
• Shutdown pquest SNF 2010-05-27 20:31:33: broken wafer inside chamber   mtang at snf.stanford.edu
• Shutdown pquest SNF 2010-05-28 21:06:32: a piece of wafer broken inside   yinliu at snf.stanford.edu
• Shutdown pquest SNF 2010-05-28 21:06:32: a piece of wafer broken inside   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2010-05-30 09:49:50: problem unloading   bucklesm at snf.stanford.edu
• Comment pquest SNF 2010-05-30 10:26:42: pquest shutdown   bucklesm at snf.stanford.edu
• Shutdown pquest SNF 2010-05-30 09:49:50: problem unloading   cbaxter at snf.stanford.edu

Last message date: Mon May 31 17:34:35 PDT 2010
Archived on: Fri Jan 11 13:09:53 PST 2013

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