From eenriquez at snf.stanford.edu  Mon Nov  1 12:16:05 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 1 Nov 2010 12:16:05 -0700
Subject: Comment pquest SNF 2010-11-01 12:16:04: Completed chamber wet clean
Message-ID: <mailman.1651.1357938572.25846.pquest-pcs@snf.stanford.edu>




From dongl at snf.stanford.edu  Wed Nov  3 16:37:53 2010
From: dongl at snf.stanford.edu (dongl at snf.stanford.edu)
Date: Wed, 3 Nov 2010 16:37:53 -0700
Subject: Problem pquest SNF 2010-11-03 16:37:53: Three small pieces of GaAs are lost inside
Message-ID: <mailman.1652.1357938573.25846.pquest-pcs@snf.stanford.edu>

Three small pieces of GaAs, each is around 0.5cm X 0.5cm, were lost inside the chamber while unloading. 



From mdickey at snf.stanford.edu  Thu Nov  4 09:32:45 2010
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Thu, 4 Nov 2010 09:32:45 -0700
Subject: Comment pquest SNF 2010-11-04 09:32:44: wafer pieces
Message-ID: <mailman.1653.1357938573.25846.pquest-pcs@snf.stanford.edu>

Recovered what appears to be the 3 wafer pices. They are on top of the load lock cover



From mdickey at snf.stanford.edu  Thu Nov  4 10:32:36 2010
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Thu, 4 Nov 2010 10:32:36 -0700
Subject: Problem pquest SNF 2010-11-03 16:37:53: Three small pieces of GaAs are lost inside
Message-ID: <mailman.1654.1357938573.25846.pquest-pcs@snf.stanford.edu>

pieces recovered



From eenriquez at snf.stanford.edu  Mon Nov  8 13:30:08 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 8 Nov 2010 13:30:08 -0800
Subject: Comment pquest SNF 2010-11-04 09:32:44: wafer pieces
Message-ID: <mailman.1655.1357938573.25846.pquest-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Mon Nov 15 11:48:03 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 15 Nov 2010 11:48:03 -0800
Subject: Comment pquest SNF 2010-11-01 12:16:04: Completed chamber wet clean
Message-ID: <mailman.1656.1357938573.25846.pquest-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Mon Nov 15 11:48:15 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 15 Nov 2010 11:48:15 -0800
Subject: Comment pquest SNF 2010-11-15 11:48:14: Completed wet clean
Message-ID: <mailman.1657.1357938573.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Wed Nov 24 18:41:13 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 24 Nov 2010 18:41:13 -0800
Subject: Comment pquest SNF 2010-11-15 11:48:14: Completed wet clean
Message-ID: <mailman.1658.1357938573.25846.pquest-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed Nov 24 18:51:11 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 24 Nov 2010 18:51:11 -0800
Subject: Comment pquest SNF 2010-11-24 18:51:10: Completed wet clean for Cl processes
Message-ID: <mailman.1659.1357938573.25846.pquest-pcs@snf.stanford.edu>

Wet cleaned the chamber and ran an O2 plasma for 30 min.



From eenriquez at snf.stanford.edu  Wed Nov 24 18:51:57 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 24 Nov 2010 18:51:57 -0800
Subject: Comment pquest SNF 2010-11-24 18:51:56: Chlorine process ONLY
Message-ID: <mailman.1660.1357938573.25846.pquest-pcs@snf.stanford.edu>