Comment pquest SNF 2010-10-04 11:08:09: Wet clean chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 4 11:08:09 PDT 2010

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Completed chamber wet clean.  Replaced 1 clamp spring.  Cleaned the gate valve.

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Next message: Comment pquest SNF 2010-09-30 15:13:48: Wafer broke, Elmer cleaned
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