Problem pquest SNF 2010-10-09 19:19:38: MW generator overload/ backside He

khu834 at snf.stanford.edu khu834 at snf.stanford.edu
Sat Oct 9 19:19:38 PDT 2010


When running oxygen3 clean recipe (700W), the MW generator ovld light is lit.
No MW power. Other recipes with lower MW power runs fine.
Backside He reading 4.1sccm




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