From cbaxter at snf.stanford.edu Wed Sep 1 08:10:05 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 1 Sep 2010 08:10:05 -0700 Subject: Shutdown pquest SNF 2010-08-31 14:31:12: clamp sensor problem Message-ID: Reset clamp stepper motor, problem is intermittent. Will schedule a downtime to troubleshoot the sensor intermittent problem. From mtang at snf.stanford.edu Wed Sep 1 14:03:04 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 1 Sep 2010 14:03:04 -0700 Subject: Comment pquest SNF 2010-09-01 14:03:04: Update from Cesar Message-ID: Cesar verified all microswitches and position sensors are working, but somehow communication is lost to the system. He plans to work on verifying the power supply is stable during wafer cycling. We are also trying to locate a wiring diagram. From jparker at snf.stanford.edu Thu Sep 2 20:40:13 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Thu, 2 Sep 2010 20:40:13 -0700 Subject: Problem pquest SNF 2010-09-02 20:40:12: Minor cooling water leak Message-ID: There is a very minor leak (minor = 1 drip every 10s of min) coming out of a part of the cooling water line. Location is: follow pump outlet from back of chiller to Whitey valve, look towards 3/8" to 1/4" reducer pointing towards ground (tied to clear plastic 3/8") and see moisture around 1/4" nut. Some moisture on plastic tubing below it, too. Nut probably just needs tightening...I might tighten it if it seemed more serious, but it should make it 'til morning. From eenriquez at snf.stanford.edu Fri Sep 3 10:11:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Sep 2010 10:11:49 -0700 Subject: Problem pquest SNF 2010-09-02 20:40:12: Minor cooling water leak Message-ID: Leak has been repaired. Also placed a drip tray. From mtang at snf.stanford.edu Fri Sep 3 11:13:15 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 3 Sep 2010 11:13:15 -0700 Subject: Shutdown pquest SNF 2010-09-03 11:13:15: Light pen stuck? Message-ID: Not sure what's wrong, but commands from the light pen don't seem to work. The screen you want pops up and disappears before you can enter anything. From mtang at snf.stanford.edu Fri Sep 3 11:14:48 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 3 Sep 2010 11:14:48 -0700 Subject: Comment pquest SNF 2010-09-03 11:14:48: Dummy wafer inside Message-ID: Forgot -- be aware that Jason's summy wafer is inside the system (now shutdown for light pen problem.) From eenriquez at snf.stanford.edu Fri Sep 3 11:33:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Sep 2010 11:33:58 -0700 Subject: Shutdown pquest SNF 2010-09-03 11:13:15: Light pen stuck? Message-ID: Rebooted the computer. From jparker at snf.stanford.edu Fri Sep 3 12:30:59 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 3 Sep 2010 12:30:59 -0700 Subject: Comment pquest SNF 2010-09-03 12:30:57: Fixed "Dummy Wafer Inside" Message-ID: Elmer came and restarted the system so the light pen is working again, chamber is empty and ready for next user. From mtang at snf.stanford.edu Fri Sep 3 12:33:09 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 3 Sep 2010 12:33:09 -0700 Subject: Comment pquest SNF 2010-09-03 11:14:48: Dummy wafer inside Message-ID: Removed. From mtang at snf.stanford.edu Fri Sep 3 12:44:22 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 3 Sep 2010 12:44:22 -0700 Subject: Comment pquest SNF 2010-09-03 12:44:21: Turbo spun down Message-ID: Following the computer reset today, the turbo pump spun down when the recipe was started. Elmer closed the VAT, restarted the tubro, went into engineering mode and toggled the foreline valve. It all started up again. Jason reports that this also happened yesterday, likewise following a computer reset for lockup. Elmer suspects the foreline valve isn't resetting the way it should. From svo at snf.stanford.edu Sun Sep 5 16:26:01 2010 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Sun, 5 Sep 2010 16:26:01 -0700 Subject: Comment pquest SNF 2010-09-05 16:26:01: middle sensor not working Message-ID: upon unloading my dummy sample, the clamp goes in and just stays there. the screen says 'waiting for clamp middle sensor.' no response after10minutes! From svo at snf.stanford.edu Sun Sep 5 16:57:58 2010 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Sun, 5 Sep 2010 16:57:58 -0700 Subject: Shutdown pquest SNF 2010-09-05 16:57:58: Message-ID: From svo at snf.stanford.edu Sun Sep 5 17:00:14 2010 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Sun, 5 Sep 2010 17:00:14 -0700 Subject: Comment pquest SNF 2010-09-05 17:00:13: shutdown Message-ID: tried resetting system but the middle sensor is still not responding. sample is in the chamber. please just put it beside the log book and i can pick it up next time...it's a dummy si with a dummy gaas sample so no worries. i left a note on top of the machine too. thanx From cbaxter at snf.stanford.edu Mon Sep 6 19:00:44 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Sep 2010 19:00:44 -0700 Subject: Shutdown pquest SNF 2010-09-05 16:57:58: Message-ID: recovered wafer and reset system.. From cbaxter at snf.stanford.edu Mon Sep 6 19:19:09 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Sep 2010 19:19:09 -0700 Subject: Comment pquest SNF 2010-09-05 17:00:13: shutdown Message-ID: From cbaxter at snf.stanford.edu Mon Sep 6 19:19:22 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Sep 2010 19:19:22 -0700 Subject: Comment pquest SNF 2010-09-05 16:26:01: middle sensor not working Message-ID: From angiel at snf.stanford.edu Tue Sep 7 15:15:27 2010 From: angiel at snf.stanford.edu (angiel at snf.stanford.edu) Date: Tue, 7 Sep 2010 15:15:27 -0700 Subject: Shutdown pquest SNF 2010-09-07 15:15:27: wafer won't unload Message-ID: "waiting for clamp middle sensor"- stuck on this step and won't unload the wafer. From eenriquez at snf.stanford.edu Wed Sep 8 19:08:57 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Sep 2010 19:08:57 -0700 Subject: Comment pquest SNF 2010-09-08 19:08:56: Update wafer wont unload Message-ID: Recovered the users wafer. The wafer clamp does not go down. It is able to go to the up position but not the middle or down positions. Still troubleshooting. From eenriquez at snf.stanford.edu Thu Sep 9 11:19:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Sep 2010 11:19:31 -0700 Subject: Shutdown pquest SNF 2010-09-07 15:15:27: wafer won't unload Message-ID: Retightened all electrical connections inside the motor controller. Also increase the load arm and clamp motor speed. Loaded and unloaded a wafer 10x without any problems. From eenriquez at snf.stanford.edu Thu Sep 9 11:19:39 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Sep 2010 11:19:39 -0700 Subject: Comment pquest SNF 2010-09-08 19:08:56: Update wafer wont unload Message-ID: Archived From eenriquez at snf.stanford.edu Thu Sep 9 14:53:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Sep 2010 14:53:51 -0700 Subject: Shutdown pquest SNF 2010-09-09 14:53:51: Handling problem Message-ID: wafer fell of the lift pins. From eenriquez at snf.stanford.edu Fri Sep 10 14:09:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Sep 2010 14:09:17 -0700 Subject: Shutdown pquest SNF 2010-09-09 14:53:51: Handling problem Message-ID: Adjusted wafer placement on the pins cycled a wafer in and out 10x without any problems. From eenriquez at snf.stanford.edu Tue Sep 14 07:44:55 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Sep 2010 07:44:55 -0700 Subject: Comment pquest SNF 2010-09-03 12:44:21: Turbo spun down Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 14 07:45:06 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Sep 2010 07:45:06 -0700 Subject: Comment pquest SNF 2010-09-03 12:30:57: Fixed "Dummy Wafer Inside" Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 14 07:45:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Sep 2010 07:45:17 -0700 Subject: Comment pquest SNF 2010-09-01 14:03:04: Update from Cesar Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 14 07:45:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Sep 2010 07:45:35 -0700 Subject: Comment pquest SNF 2010-08-16 11:31:38: Completed monthly PM Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 14 07:45:43 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Sep 2010 07:45:43 -0700 Subject: Comment pquest SNF 2010-08-09 11:30:18: wet clean completed Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 14 07:46:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Sep 2010 07:46:02 -0700 Subject: Comment pquest SNF 2010-06-16 21:05:21: LED Flashlight flickering:Maybe low battery Message-ID: Battery has been replaced From chingmei at snf.stanford.edu Tue Sep 14 12:02:12 2010 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Tue, 14 Sep 2010 12:02:12 -0700 Subject: Shutdown pquest SNF 2010-09-14 12:02:12: wafer broken Message-ID: After the dry run, when I unload thedummy wafer. It smeshed suddenly. From maurice at snf.stanford.edu Tue Sep 14 15:18:45 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Sep 2010 15:18:45 -0700 Subject: Shutdown pquest SNF 2010-09-14 12:02:12: wafer broken Message-ID: wafer removed...O2 chamber clean From eenriquez at snf.stanford.edu Tue Sep 14 15:25:13 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Sep 2010 15:25:13 -0700 Subject: Comment pquest SNF 2010-09-14 15:25:12: Broken wafer Message-ID: Wet cleaned the chamber and replaced clamp springs. From altamash at snf.stanford.edu Tue Sep 14 22:24:15 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Tue, 14 Sep 2010 22:24:15 -0700 Subject: Comment pquest SNF 2010-09-14 22:24:15: Torch batteries need to be replaced Message-ID: From mtang at snf.stanford.edu Wed Sep 15 11:40:50 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:40:50 -0700 Subject: Comment pquest SNF 2010-09-15 11:40:50: Base pressure at 2.8 mtorr Message-ID: From mtang at snf.stanford.edu Wed Sep 15 12:42:42 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 15 Sep 2010 12:42:42 -0700 Subject: Comment pquest SNF 2010-09-15 11:40:50: Base pressure at 2.8 mtorr Message-ID: Sorry, I was mistaken -- I understand that this readout is always high and that the system actually controls off the VAT readout. From mtang at snf.stanford.edu Thu Sep 16 12:35:05 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 16 Sep 2010 12:35:05 -0700 Subject: Comment pquest SNF 2010-09-14 22:24:15: Torch batteries need to be replaced Message-ID: Done. From eenriquez at snf.stanford.edu Mon Sep 20 09:59:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 09:59:36 -0700 Subject: Comment pquest SNF 2010-09-20 09:59:35: Completed monthly PM Message-ID: From eenriquez at snf.stanford.edu Mon Sep 20 10:00:28 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 10:00:28 -0700 Subject: Comment pquest SNF 2010-09-14 15:25:12: Broken wafer Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 22 16:10:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Sep 2010 16:10:51 -0700 Subject: Problem pquest SNF 2010-08-23 08:59:47: Intermittent sensor problem Message-ID: Tightened all connections inside the motor controller. All position sensors and motor speed control goes to this controller. From eenriquez at snf.stanford.edu Wed Sep 22 16:11:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Sep 2010 16:11:36 -0700 Subject: Problem pquest SNF 2010-05-14 10:19:31: He leak high Message-ID: Clamp has been releveled and the oring replaced. From eenriquez at snf.stanford.edu Wed Sep 22 17:28:55 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Sep 2010 17:28:55 -0700 Subject: Problem pquest SNF 2010-05-20 08:13:17: we are out of log book Message-ID: From eenriquez at snf.stanford.edu Wed Sep 22 17:30:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Sep 2010 17:30:56 -0700 Subject: Problem pquest SNF 2010-05-02 12:20:39: ECR Reverse power unstable Message-ID: Unable to duplicate the problem. From vijayn at snf.stanford.edu Thu Sep 23 15:30:01 2010 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Thu, 23 Sep 2010 15:30:01 -0700 Subject: Comment pquest SNF 2010-09-23 15:30:01: MW Power Fluctuating Message-ID: Still observing microwave power fluctuations in all programs (incl. oxygen 3). Normally steady at 697W forward, but now oscillating between this value and 688W. From mtang at snf.stanford.edu Thu Sep 23 16:27:33 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:27:33 -0700 Subject: Comment pquest SNF 2010-07-23 11:27:43: Out of log sheets Message-ID: Logsheets are available. From mtang at snf.stanford.edu Thu Sep 23 16:27:46 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:27:46 -0700 Subject: Comment pquest SNF 2010-07-28 13:26:42: need more log book pages Message-ID: Logsheets available. From mtang at snf.stanford.edu Thu Sep 30 15:13:49 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 30 Sep 2010 15:13:49 -0700 Subject: Comment pquest SNF 2010-09-30 15:13:48: Wafer broke, Elmer cleaned Message-ID: Broke a wafer during training (reminder to self: CAREFULLY READ AND THINK before answering each prompt!) Elmer stayed late to clean up and test. He not only cleaned up the chips, but ensured there was no short due to lost wafer chips in the dark space and ran a dummy wafer on Oxygen3 to ensure He clamping and wafer transfer were good. Thanks EE. Ran 20 minutes of oxygen3. Put in new logsheets.