Comment pquest SNF 2010-09-14 15:25:12: Broken wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Sep 14 15:25:13 PDT 2010
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Comment pquest SNF 2010-09-14 15:25:12: Broken wafer
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Wet cleaned the chamber and replaced clamp springs.
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Shutdown pquest SNF 2010-09-14 12:02:12: wafer broken
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Comment pquest SNF 2010-09-14 15:25:12: Broken wafer
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