From mdickey at snf.stanford.edu Fri Apr 1 10:38:46 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 1 Apr 2011 10:38:46 -0700 Subject: Comment pquest SNF 2011-04-01 10:38:45: chamber clean Message-ID: Wet clean done on chamber, ran O2 clean. Ready for Chlorine From vijayn at snf.stanford.edu Wed Apr 6 20:49:12 2011 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Wed, 6 Apr 2011 20:49:12 -0700 Subject: Problem pquest SNF 2011-04-06 20:49:10: uW Power Setpoint Message-ID: In recipe MgCl2O2, attempted to set microwave power to 300W in step 3. Mircowave readout showed only 154W of forward power with 0 reflected power. Power readings for previous oxygen3 clean and preconditioning with MgCl2O2 were both normal. From angiel at snf.stanford.edu Thu Apr 7 10:40:03 2011 From: angiel at snf.stanford.edu (angiel at snf.stanford.edu) Date: Thu, 7 Apr 2011 10:40:03 -0700 Subject: Problem pquest SNF 2011-04-07 10:40:02: uwave power ok on my run Message-ID: Ran angiel recipe (standard GaAs/GaP etch) and uwave power reached 200W as normal From eenriquez at snf.stanford.edu Thu Apr 7 12:00:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 7 Apr 2011 12:00:27 -0700 Subject: Problem pquest SNF 2011-04-07 10:40:02: uwave power ok on my run Message-ID: Archived From eenriquez at snf.stanford.edu Thu Apr 7 12:03:24 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 7 Apr 2011 12:03:24 -0700 Subject: Problem pquest SNF 2011-04-06 20:49:10: uW Power Setpoint Message-ID: Problem was recipe related. Was able to run the Oxygen 3 @ 700 W with no problems. Re-entered the power setting on step 3 (300 watts) in the user's recipe and it ran without any problems. From gshambat at snf.stanford.edu Thu Apr 7 17:49:48 2011 From: gshambat at snf.stanford.edu (gshambat at snf.stanford.edu) Date: Thu, 7 Apr 2011 17:49:48 -0700 Subject: Comment pquest SNF 2011-04-07 17:49:47: System locked in run window Message-ID: Should still run fine but can't get to home screen From khu834 at snf.stanford.edu Thu Apr 7 20:15:05 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Thu, 7 Apr 2011 20:15:05 -0700 Subject: Comment pquest SNF 2011-04-07 20:15:05: Run recipe Message-ID: Cannot exit out of run recipe screen From eenriquez at snf.stanford.edu Fri Apr 8 09:09:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 09:09:14 -0700 Subject: Comment pquest SNF 2011-04-07 17:49:47: System locked in run window Message-ID: Rebooted the computer. From eenriquez at snf.stanford.edu Fri Apr 8 09:09:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 09:09:19 -0700 Subject: Comment pquest SNF 2011-04-07 20:15:05: Run recipe Message-ID: Rebooted the computer. From eenriquez at snf.stanford.edu Fri Apr 8 09:09:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 09:09:27 -0700 Subject: Comment pquest SNF 2011-03-21 10:35:39: Pumped out O2 line Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 8 09:09:38 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 09:09:38 -0700 Subject: Comment pquest SNF 2011-03-04 10:48:22: Completed chamber clean Message-ID: Archived From justinwu at snf.stanford.edu Fri Apr 8 13:59:03 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Fri, 8 Apr 2011 13:59:03 -0700 Subject: Shutdown pquest SNF 2011-04-08 13:59:02: Broken wafer in chamber Message-ID: Wafer broken during loading, unsure of why. (Was using a fresh p-type wafer) From eenriquez at snf.stanford.edu Fri Apr 8 15:32:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 15:32:15 -0700 Subject: Shutdown pquest SNF 2011-04-08 13:59:02: Broken wafer in chamber Message-ID: Cleaned the chamber and ran an O2 plasma. From jimkruger at snf.stanford.edu Fri Apr 8 15:39:08 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 8 Apr 2011 15:39:08 -0700 Subject: Comment pquest SNF 2011-04-08 15:39:06: All the Log sheets are used Message-ID: From jimkruger at snf.stanford.edu Mon Apr 18 11:51:35 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 18 Apr 2011 11:51:35 -0700 Subject: Shutdown pquest SNF 2011-04-18 11:51:35: Wafer stuck to clamp Message-ID: Not broken (yet). Please recover carrier wafer and the sample carefully to the boxed at PQuest. From eenriquez at snf.stanford.edu Mon Apr 18 14:06:31 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Apr 2011 14:06:31 -0700 Subject: Shutdown pquest SNF 2011-04-18 11:51:35: Wafer stuck to clamp Message-ID: Recovered wafer and ran O2 plasma. From justinwu at snf.stanford.edu Mon Apr 18 19:28:18 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Mon, 18 Apr 2011 19:28:18 -0700 Subject: Comment pquest SNF 2011-04-18 19:28:17: Pressure reading Message-ID: Offset between reading on VAT and reading on pquest screen seems to have changed. (Opened valve all the way on local setting for several minutes, however pressure reading on screen did not go as low as before) From justinwu at snf.stanford.edu Mon Apr 25 18:33:36 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Mon, 25 Apr 2011 18:33:36 -0700 Subject: Shutdown pquest SNF 2011-04-25 18:33:36: Wafer stuck to clamp Message-ID: Wafer appears intact; stuck to upper clamp; cannot be unloaded. From cbaxter at snf.stanford.edu Tue Apr 26 08:45:41 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 26 Apr 2011 08:45:41 -0700 Subject: Shutdown pquest SNF 2011-04-25 18:33:36: Wafer stuck to clamp Message-ID: Recovered user's wafer and ran O3 clean From justinwu at snf.stanford.edu Thu Apr 28 17:56:54 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 28 Apr 2011 17:56:54 -0700 Subject: Shutdown pquest SNF 2011-04-28 17:56:54: Wafer stuck again, broken when unloading Message-ID: The wafer was stuck to the clamp, tried unloading, heard a crunch. The process was a H2 plasma followed immediately by a Cl2 plasma; wafer was intact during plasma. (Wafer used is blank Si/SiO2, no resist, pieces placed in center of wafer.) From eenriquez at snf.stanford.edu Fri Apr 29 15:13:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:13:01 -0700 Subject: Shutdown pquest SNF 2011-04-28 17:56:54: Wafer stuck again, broken when unloading Message-ID: Recovered the users wafer chips and placed them in his wafer holder. Wet cleaned the chamber, replaced clamp springs and ran O2 plasma. From eenriquez at snf.stanford.edu Fri Apr 29 15:13:26 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:13:26 -0700 Subject: Comment pquest SNF 2011-04-29 15:13:25: Completed chamber clean Message-ID: Wet cleaned the chamber, replaced clamp springs and ran O2 plasma. From eenriquez at snf.stanford.edu Fri Apr 29 15:13:36 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:13:36 -0700 Subject: Comment pquest SNF 2011-04-01 10:38:45: chamber clean Message-ID: Archived