Shutdown pquest SNF 2011-04-08 13:59:02: Broken wafer in chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Apr 8 15:32:15 PDT 2011
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Shutdown pquest SNF 2011-04-08 13:59:02: Broken wafer in chamber
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Comment pquest SNF 2011-04-08 15:39:06: All the Log sheets are used
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Cleaned the chamber and ran an O2 plasma.
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Shutdown pquest SNF 2011-04-08 13:59:02: Broken wafer in chamber
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Comment pquest SNF 2011-04-08 15:39:06: All the Log sheets are used
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