Shutdown pquest SNF 2011-04-25 18:33:36: Wafer stuck to clamp
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Apr 26 08:45:41 PDT 2011
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Shutdown pquest SNF 2011-04-25 18:33:36: Wafer stuck to clamp
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Shutdown pquest SNF 2011-04-28 17:56:54: Wafer stuck again, broken when unloading
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Recovered user's wafer and ran O3 clean
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Shutdown pquest SNF 2011-04-25 18:33:36: Wafer stuck to clamp
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Shutdown pquest SNF 2011-04-28 17:56:54: Wafer stuck again, broken when unloading
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