Shutdown pquest SNF 2011-04-28 17:56:54: Wafer stuck again, broken when unloading

justinwu at snf.stanford.edu justinwu at snf.stanford.edu
Thu Apr 28 17:56:54 PDT 2011


The wafer was stuck to the clamp, tried unloading, heard a crunch. The process was a H2 plasma followed immediately by a Cl2 plasma; wafer was intact during plasma.
(Wafer used is blank Si/SiO2, no resist, pieces placed in center of wafer.)




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