Shutdown pquest SNF 2011-04-28 17:56:54: Wafer stuck again, broken when unloading

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 29 15:13:01 PDT 2011


Recovered the users wafer chips and placed them in his wafer holder.
Wet cleaned the chamber, replaced clamp springs and ran O2 plasma.




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